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Melt growth, characterization and properties of bulk In2O3 single crystals

Identifieur interne : 000916 ( Main/Repository ); précédent : 000915; suivant : 000917

Melt growth, characterization and properties of bulk In2O3 single crystals

Auteurs : RBID : Pascal:13-0116322

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English descriptors

Abstract

Truly bulk In2O3 single crystals were obtained from the melt for the first time using an innovative growth technique, and, for comparative purpose, from the gas phase (PVT). In2O3 undergoes a strong decomposition at elevated temperatures even under high oxygen partial pressure. Bulk single crystals obtained from the melt were dark-brown in color, which changes to greenish upon annealing in a non-reducing atmosphere (i.e. neutral and oxidizing). As-grown In2O3 crystals obtained by the PVT method were dark-green. All melt and PVT-grown crystals had n-type conductivity with electron concentration respectively around 2-3 x 1018/1.5 x 1019 cm-3, Hall mobility of 145/110 cm2 V-1 s-1 and resistivity of 1.5-2.5 x 10-2/4-5 x 10-3 Ω cm, where the first value corresponds to melt-grown and the second to PVT crystals. Annealing in the non-reducing atmosphere decreased the electron concentration by one order of magnitude in melt-grown crystals, but produced no effects in PVT-grown In2O3. Annealing of melt-grown In2O3 crystals lead to a metal-semiconductor like transition. Melt- and PVT-grown crystals exhibited cut-off wavelength at 440 nm. Melt-grown In2O3 crystals became fully transparent upon annealing. Their visible and IR spectrum showed a sharp absorption edge. The FWHM of the rocking curve of the melt-grown In2O3 single crystals was 28 arcsec.

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Pascal:13-0116322

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<term>Absorption edge</term>
<term>Annealing</term>
<term>Carrier density</term>
<term>Crystal growth from vapors</term>
<term>Crystal structure</term>
<term>Electrical conductivity</term>
<term>Electrical properties</term>
<term>Growth from melt</term>
<term>Growth mechanism</term>
<term>Hall mobility</term>
<term>High pressure</term>
<term>Indium oxide</term>
<term>Infrared spectra</term>
<term>Monocrystals</term>
<term>N type conductivity</term>
<term>Partial pressure</term>
<term>Rocking curve</term>
<term>Semiconductor materials</term>
<term>Semiconductor metal transition</term>
<term>Transmittance</term>
<term>Visible spectra</term>
<term>XRD</term>
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<term>Méthode phase fondue</term>
<term>Mécanisme croissance</term>
<term>Haute pression</term>
<term>Pression partielle</term>
<term>Recuit</term>
<term>Croissance cristalline en phase vapeur</term>
<term>Conductivité type n</term>
<term>Densité porteur charge</term>
<term>Mobilité Hall</term>
<term>Conductivité électrique</term>
<term>Transition métal semiconducteur</term>
<term>Spectre visible</term>
<term>Spectre IR</term>
<term>Limite absorption</term>
<term>Oxyde d'indium</term>
<term>Monocristal</term>
<term>Semiconducteur</term>
<term>Structure cristalline</term>
<term>Diagramme rotation</term>
<term>Diffraction RX</term>
<term>Propriété électrique</term>
<term>Facteur transmission</term>
<term>In2O3</term>
<term>6166F</term>
<term>8110F</term>
<term>8110A</term>
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<front>
<div type="abstract" xml:lang="en">Truly bulk In
<sub>2</sub>
O
<sub>3</sub>
single crystals were obtained from the melt for the first time using an innovative growth technique, and, for comparative purpose, from the gas phase (PVT). In
<sub>2</sub>
O
<sub>3</sub>
undergoes a strong decomposition at elevated temperatures even under high oxygen partial pressure. Bulk single crystals obtained from the melt were dark-brown in color, which changes to greenish upon annealing in a non-reducing atmosphere (i.e. neutral and oxidizing). As-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals obtained by the PVT method were dark-green. All melt and PVT-grown crystals had n-type conductivity with electron concentration respectively around 2-3 x 10
<sup>18</sup>
/1.5 x 10
<sup>19</sup>
cm
<sup>-3</sup>
, Hall mobility of 145/110 cm
<sup>2</sup>
V
<sup>-1</sup>
s
<sup>-1</sup>
and resistivity of 1.5-2.5 x 10
<sup>-2</sup>
/4-5 x 10
<sup>-3</sup>
Ω cm, where the first value corresponds to melt-grown and the second to PVT crystals. Annealing in the non-reducing atmosphere decreased the electron concentration by one order of magnitude in melt-grown crystals, but produced no effects in PVT-grown In
<sub>2</sub>
O
<sub>3</sub>
. Annealing of melt-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals lead to a metal-semiconductor like transition. Melt- and PVT-grown crystals exhibited cut-off wavelength at 440 nm. Melt-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals became fully transparent upon annealing. Their visible and IR spectrum showed a sharp absorption edge. The FWHM of the rocking curve of the melt-grown In
<sub>2</sub>
O
<sub>3</sub>
single crystals was 28 arcsec.</div>
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<sub>2</sub>
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<sub>3</sub>
single crystals were obtained from the melt for the first time using an innovative growth technique, and, for comparative purpose, from the gas phase (PVT). In
<sub>2</sub>
O
<sub>3</sub>
undergoes a strong decomposition at elevated temperatures even under high oxygen partial pressure. Bulk single crystals obtained from the melt were dark-brown in color, which changes to greenish upon annealing in a non-reducing atmosphere (i.e. neutral and oxidizing). As-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals obtained by the PVT method were dark-green. All melt and PVT-grown crystals had n-type conductivity with electron concentration respectively around 2-3 x 10
<sup>18</sup>
/1.5 x 10
<sup>19</sup>
cm
<sup>-3</sup>
, Hall mobility of 145/110 cm
<sup>2</sup>
V
<sup>-1</sup>
s
<sup>-1</sup>
and resistivity of 1.5-2.5 x 10
<sup>-2</sup>
/4-5 x 10
<sup>-3</sup>
Ω cm, where the first value corresponds to melt-grown and the second to PVT crystals. Annealing in the non-reducing atmosphere decreased the electron concentration by one order of magnitude in melt-grown crystals, but produced no effects in PVT-grown In
<sub>2</sub>
O
<sub>3</sub>
. Annealing of melt-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals lead to a metal-semiconductor like transition. Melt- and PVT-grown crystals exhibited cut-off wavelength at 440 nm. Melt-grown In
<sub>2</sub>
O
<sub>3</sub>
crystals became fully transparent upon annealing. Their visible and IR spectrum showed a sharp absorption edge. The FWHM of the rocking curve of the melt-grown In
<sub>2</sub>
O
<sub>3</sub>
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</fC03>
<fC03 i1="07" i2="X" l="ENG">
<s0>N type conductivity</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="SPA">
<s0>Conductividad tipo n</s0>
<s5>07</s5>
</fC03>
<fC03 i1="08" i2="3" l="FRE">
<s0>Densité porteur charge</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="3" l="ENG">
<s0>Carrier density</s0>
<s5>08</s5>
</fC03>
<fC03 i1="09" i2="3" l="FRE">
<s0>Mobilité Hall</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="3" l="ENG">
<s0>Hall mobility</s0>
<s5>09</s5>
</fC03>
<fC03 i1="10" i2="3" l="FRE">
<s0>Conductivité électrique</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="3" l="ENG">
<s0>Electrical conductivity</s0>
<s5>10</s5>
</fC03>
<fC03 i1="11" i2="X" l="FRE">
<s0>Transition métal semiconducteur</s0>
<s5>11</s5>
</fC03>
<fC03 i1="11" i2="X" l="ENG">
<s0>Semiconductor metal transition</s0>
<s5>11</s5>
</fC03>
<fC03 i1="11" i2="X" l="SPA">
<s0>Transición metal semiconductor</s0>
<s5>11</s5>
</fC03>
<fC03 i1="12" i2="3" l="FRE">
<s0>Spectre visible</s0>
<s5>12</s5>
</fC03>
<fC03 i1="12" i2="3" l="ENG">
<s0>Visible spectra</s0>
<s5>12</s5>
</fC03>
<fC03 i1="13" i2="3" l="FRE">
<s0>Spectre IR</s0>
<s5>13</s5>
</fC03>
<fC03 i1="13" i2="3" l="ENG">
<s0>Infrared spectra</s0>
<s5>13</s5>
</fC03>
<fC03 i1="14" i2="3" l="FRE">
<s0>Limite absorption</s0>
<s5>14</s5>
</fC03>
<fC03 i1="14" i2="3" l="ENG">
<s0>Absorption edge</s0>
<s5>14</s5>
</fC03>
<fC03 i1="15" i2="X" l="FRE">
<s0>Oxyde d'indium</s0>
<s5>15</s5>
</fC03>
<fC03 i1="15" i2="X" l="ENG">
<s0>Indium oxide</s0>
<s5>15</s5>
</fC03>
<fC03 i1="15" i2="X" l="SPA">
<s0>Indio óxido</s0>
<s5>15</s5>
</fC03>
<fC03 i1="16" i2="3" l="FRE">
<s0>Monocristal</s0>
<s5>16</s5>
</fC03>
<fC03 i1="16" i2="3" l="ENG">
<s0>Monocrystals</s0>
<s5>16</s5>
</fC03>
<fC03 i1="17" i2="3" l="FRE">
<s0>Semiconducteur</s0>
<s5>17</s5>
</fC03>
<fC03 i1="17" i2="3" l="ENG">
<s0>Semiconductor materials</s0>
<s5>17</s5>
</fC03>
<fC03 i1="18" i2="3" l="FRE">
<s0>Structure cristalline</s0>
<s5>29</s5>
</fC03>
<fC03 i1="18" i2="3" l="ENG">
<s0>Crystal structure</s0>
<s5>29</s5>
</fC03>
<fC03 i1="19" i2="X" l="FRE">
<s0>Diagramme rotation</s0>
<s5>30</s5>
</fC03>
<fC03 i1="19" i2="X" l="ENG">
<s0>Rocking curve</s0>
<s5>30</s5>
</fC03>
<fC03 i1="19" i2="X" l="SPA">
<s0>Diagrama rotación</s0>
<s5>30</s5>
</fC03>
<fC03 i1="20" i2="3" l="FRE">
<s0>Diffraction RX</s0>
<s5>31</s5>
</fC03>
<fC03 i1="20" i2="3" l="ENG">
<s0>XRD</s0>
<s5>31</s5>
</fC03>
<fC03 i1="21" i2="3" l="FRE">
<s0>Propriété électrique</s0>
<s5>32</s5>
</fC03>
<fC03 i1="21" i2="3" l="ENG">
<s0>Electrical properties</s0>
<s5>32</s5>
</fC03>
<fC03 i1="22" i2="X" l="FRE">
<s0>Facteur transmission</s0>
<s5>33</s5>
</fC03>
<fC03 i1="22" i2="X" l="ENG">
<s0>Transmittance</s0>
<s5>33</s5>
</fC03>
<fC03 i1="22" i2="X" l="SPA">
<s0>Factor transmisión</s0>
<s5>33</s5>
</fC03>
<fC03 i1="23" i2="3" l="FRE">
<s0>In2O3</s0>
<s4>INC</s4>
<s5>46</s5>
</fC03>
<fC03 i1="24" i2="3" l="FRE">
<s0>6166F</s0>
<s4>INC</s4>
<s5>65</s5>
</fC03>
<fC03 i1="25" i2="3" l="FRE">
<s0>8110F</s0>
<s4>INC</s4>
<s5>71</s5>
</fC03>
<fC03 i1="26" i2="3" l="FRE">
<s0>8110A</s0>
<s4>INC</s4>
<s5>72</s5>
</fC03>
<fC03 i1="27" i2="3" l="FRE">
<s0>8110B</s0>
<s4>INC</s4>
<s5>73</s5>
</fC03>
<fN21>
<s1>091</s1>
</fN21>
</pA>
<pR>
<fA30 i1="01" i2="1" l="ENG">
<s1>CGCT-5 Asia Conference on Crystal Growth and Crystal Technologies</s1>
<s2>5</s2>
<s3>Singapore SGP</s3>
<s4>2011-06-26</s4>
</fA30>
</pR>
</standard>
</inist>
</record>

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